Abstract:
With the rapid development of the integrated circuit (IC) industry, organic wastewater generated during its manufacturing has garnered great attention. This wastewater is characterized by complex composition, high toxicity and poor biodegradability. The safe disposal and resource recovery of such organic wastewater are of great significance for the sustainable development of the IC industry. However, a comprehensive literature review discussing resource and energy recovery alongside advanced detoxification of organic wastewater in the IC industry is still lacking. This paper systematically reviews the main sources and physical-chemical properties of IC organic wastewater, and analyzes the occurrence of bulk organic pollutants (e.g., tetramethylammonium hydroxide, N-methylpyrrolidone, isopropanol, acetone, and propylene glycol methyl ether acetate) and trace emerging contaminants (e.g., per- and polyfluoroalkyl substances, PFAS). On this basis, the current research status of IC organic wastewater treatment is reviewed from three perspectives: resource recovery, energy conversion, and deep detoxification. For high-concentration, single-component organic waste liquids/wastewaters, priority is given to the direct recovery or downgraded utilization of high-purity components. For example, cation exchange resins have been successfully used to recover tetramethylammonium hydroxide. For medium-to-high concentration organic wastewater, methane production through anaerobic digestion represents an important pathway for resource utilization. For the advanced treatment of low-concentration wastewater and effluent after biological treatment, physical and chemical processes such as adsorption and oxidation are commonly employed. The advantages, disadvantages, and applicability of various technologies are systematically compared from three dimensions: technical efficiency (e.g., removal rate, mineralization degree), economic feasibility (e.g., energy consumption, operational cost), and engineering applicability (e.g., maturity, scalability for real IC wastewater). In addition, this paper explores the current challenges in IC organic wastewater treatment, including the relatively low economic benefits of resource recycling, the inhibition of biological treatment by high concentrations of toxicants (such as tetramethylammonium hydroxide), and destruction of PFAS within complex water matrices. Finally, future development trends regarding intelligent technology, integrated processes, and full-life-cycle pollution control are outlined, providing theoretical references and technical support for the efficient and green treatment of IC organic wastewater.